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Code of Federal Regulations (Last Updated: May 6, 2024)

Title 40 - Protection of Environment

Chapter I—Environmental Protection Agency

SubChapter C—Air Programs

Part 98 - Mandatory Greenhouse Gas Reporting

Subpart I - Electronics Manufacturing

Table I-11 to Subpart I of Part 98 - —Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method (150 mm and 200 mm Wafers)

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Table I-11 to Subpart I of Part 98—Default Emission Factors (1-U_ij) for Gas Utilization Rates (U_ij) and By-Product Formation Rates (B_ijk) for Semiconductor Manufacturing for Use With the Stack Test Method (150 mm and 200 mm Wafers)
Cross Reference
Link to an amendment published at 89 FR 31921, Apr. 25, 2024.

[78 FR 68229, Nov. 13, 2013]

                    
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