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Code of Federal Regulations (Last Updated: July 5, 2024) |
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Title 40 - Protection of Environment |
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Chapter I—Environmental Protection Agency |
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SubChapter C—Air Programs |
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Part 98 - Mandatory Greenhouse Gas Reporting |
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Subpart I - Electronics Manufacturing |
Table I-12 to Subpart I of Part 98 - —Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method (300 mm and 450 mm Wafers)
Latest version.
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Table I-12 to Subpart I of Part 98—Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for Use With the Stack Test Method (300 mm and 450 mm Wafers)
[78 FR 68230, Nov. 13, 2013]