Table I-17 to Subpart I of Part 98 - —Expected and Possible By-Products for Electronics Manufacturing  


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  • Table I-17 to Subpart I of Part 98—Expected and Possible By-Products for Electronics Manufacturinglg Manufacturing

    For each stack system for which you use the “stack test method” to calculate annual emissions, you must measure the following: If emissions are detected intermittently, use the
    following procedures:
    If emissions are not detected, use the
    following procedures:
    Expected By-products:
    CF4
    C2F6
    CHF3
    CH2F2
    CH3F
    Use the measured concentration for “Xksm” in Equation I-18 when available and use one-half of the field detection limit you determined for the fluorinated GHG according to § 98.94(j)(2) for the value of “Xksm” when the fluorinated GHG is not detectedUse one-half of the field detection limit you determined for the fluorinated GHG according to § 98.94(j)(2) for the value of “Xksm” in Equation I-18.
    Possible By-products:
    C3F8
    C4F6
    c-C4F8
    C5F8
    Use the measured concentration for “Xksm” in Equation I-18 when available and use one-half of the field detection limit you determined for the fluorinated GHG according to § 98.94(j)(2) for the value of “Xksm” when the fluorinated GHG is not detectedAssume zero emissions for that fluorinated GHG for the tested stack system.

    [78 FR 68234, Nov. 13, 2013]