Table I-1 to Subpart I of Part 98 - —Default Emission Factors for Threshold Applicability Determination

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Table I-1 to Subpart I of Part 98—Default Emission Factors for Threshold Applicability Determination
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Link to an amendment published at 89 FR 31919, Apr. 25, 2024.
Product type Emission factors EF_i
CF₄ C₂F₆ CHF₃ C₃F₈ NF₃ SF₆
Semiconductors (kg/m²) 0.90 1.00 0.04 0.05 0.04 0.20
LCD (g/m²) 0.50 NA NA NA 0.90 4.00
MEMS (kg/m²) NA NA NA NA NA 1.02
Notes: NA denotes not applicable based on currently available information.
[75 FR 74818, Dec. 1, 2010, as amended at 78 FR 68221, Nov. 13, 2013]

Product type	Emission factors EF_i
Semiconductors (kg/m²)	0.90	1.00	0.04	0.05	0.04	0.20
LCD (g/m²)	0.50	NA	NA	NA	0.90	4.00
MEMS (kg/m²)	NA	NA	NA	NA	NA	1.02

                    
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Table I-1 to Subpart I of Part 98 - —Default Emission Factors for Threshold Applicability Determination

Table I-1 to Subpart I of Part 98—Default Emission Factors for Threshold Applicability Determination

Cross Reference