Table I-2 to Subpart I of Part 98 - —Examples of Fluorinated GHGs Used by the Electronics Industry

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Table I-2 to Subpart I of Part 98—Examples of Fluorinated GHGs Used by the Electronics Industry

Product type	Fluorinated GHGs and fluorinated heat transfer fluids used during manufacture
Electronics	CF₄, C₂F₆, C₃F₈, c-C₄F₈, c-C₄F₈O, C₄F₆, C₅F₈, CHF₃, CH₂F₂, NF₃, SF₆, and fluorinated HTFs (CF₃-(O-CF(CF₃)-CF₂)_n-(O-CF₂)_m-O-CF₃, C_nF_{2n + 2}, C_nF_{2n + 1}(O)C_mF_{2m + 1}, C_nF₂.O, (C_nF_{2n + 1})_3N).

[77 FR 10381, Feb. 22, 2012]

                    
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Table I-2 to Subpart I of Part 98 - —Examples of Fluorinated GHGs Used by the Electronics Industry

Table I-2 to Subpart I of Part 98—Examples of Fluorinated GHGs Used by the Electronics Industry

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