Code of Federal Regulations (Last Updated: November 8, 2024) |
Title 40 - Protection of Environment |
Chapter I - Environmental Protection Agency |
SubChapter C - Air Programs |
Part 98 - Mandatory Greenhouse Gas Reporting |
Subpart I - Electronics Manufacturing |
Table I-4 to Subpart I - Table I-4 to Subpart I of Part 98-Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for Semiconductor Manufacturing for 300 mm Wafer Size
Latest version.
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[81 FR 89256, Dec. 9, 2016]