Table I-6 to Subpart I of Part 98 - Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for LCD Manufacturing

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Table I-6 to Subpart I of Part 98 - Default Emission Factors (1-U_ij) for Gas Utilization Rates (U_ij) and By-Product Formation Rates (B_ijk) for LCD Manufacturing

Process type factors	Process gas i
Process type factors	CF₄	C₂F₆	CHF₃	CH₂F₂	C₃F₈	c− C₄F₈	NF₃ Remote	NF₃	SF₆
Etch 1-U_i	0.6	NA	0.2	NA	NA	0.1	NA	NA	0.3
Etch BCF₄	NA	NA	0.07	NA	NA	0.009	NA	NA	NA
Etch BCHF₃	NA	NA	NA	NA	NA	0.02	NA	NA	NA
Etch BC₂F₄	NA	NA	0.05	NA	NA	NA	NA	NA	NA
CVD Chamber Cleaning 1-U_i	NA	NA	NA	NA	NA	NA	0.03	0.3	0.9

[75 FR 74818, Dec. 1, 2010, as amended at 78 FR 68225, Nov. 13, 2013]

                    
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