Table I-6 to Subpart I of Part 98 - Default Emission Factors (1-Uij) for Gas Utilization Rates (Uij) and By-Product Formation Rates (Bijk) for LCD Manufacturing

Table I-6 to Subpart I of Part 98 - Default Emission Factors (1-U_ij) for Gas Utilization Rates (U_ij) and By-Product Formation Rates (B_ijk) for LCD Manufacturing

Process type factors	Process gas i
	CF4	C2F6	CHF3	CH2F2	C3F8	c− C4F8	NF3 Remote	NF3	SF6
Etch 1-Ui	0.6	NA	0.2	NA	NA	0.1	NA	NA	0.3
Etch BCF4	NA	NA	0.07	NA	NA	0.009	NA	NA	NA
Etch BCHF3	NA	NA	NA	NA	NA	0.02	NA	NA	NA
Etch BC2F4	NA	NA	0.05	NA	NA	NA	NA	NA	NA
CVD Chamber Cleaning 1-Ui	NA	NA	NA	NA	NA	NA	0.03	0.3	0.9

Notes: NA = Not applicable; i.e., there are no applicable default emission factor measurements for this gas. This does not necessarily imply that a particular gas is not used in or emitted from a particular process sub-type or process type.

[75 FR 74818, Dec. 1, 2010, as amended at 78 FR 68225, Nov. 13, 2013]