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Code of Federal Regulations (Last Updated: May 6, 2024) |
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Title 40 - Protection of Environment |
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Chapter I - Environmental Protection Agency |
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SubChapter C - Air Programs |
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Part 63 - National Emission Standards for Hazardous Air Pollutants for Source Categories |
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Subpart BBBBB - National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing |
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What This Subpart Covers |
§ 63.7180 - What is the purpose of this subpart?
Latest version.
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§ 63.7180 What is the purpose of this subpart?
This subpart establishes national emission standards for hazardous air pollutants (NESHAP) for semiconductor manufacturing facilities. This subpart also establishes requirements to demonstrate initial and continuous compliance with the emission standards.