Comment submitted by Jay M. Dietrich, CEA Program Manager, Senior Technical Staff Member, IBM Corporation

Document ID: EPA-HQ-OAR-2009-0927-0251
Document Type: Public Submission
Agency: Environmental Protection Agency
Received Date: July 22 2011, at 12:00 AM Eastern Daylight Time
Date Posted: July 28 2011, at 12:00 AM Eastern Standard Time
Comment Start Date: June 22 2011, at 12:00 AM Eastern Standard Time
Comment Due Date: July 22 2011, at 11:59 PM Eastern Standard Time
Tracking Number: 80ecb8d7
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Analysis of IBM PFC Using Equipment Sets with Regards to Allocation and Verification

Title:
Analysis of IBM PFC Using Equipment Sets with Regards to Allocation and Verification

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Comment

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Comment

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Cover Page

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Cover Page

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Evaluation of Error in using MFC Flow Integration to Estimate PFC Gas Consumption

Title:
Evaluation of Error in using MFC Flow Integration to Estimate PFC Gas Consumption

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IBM's comments on EPA's Docket ID No. EPA-HQ-OAR-2010-0964

Title:
IBM's comments on EPA's Docket ID No. EPA-HQ-OAR-2010-0964

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Request for Extension of Use of Best Available Monitoring Methods Electronic Manufacturing (Subpart I) Mandatory Reporting of Greenhouse Gases (40 CFR Part 98)

Title:
Request for Extension of Use of Best Available Monitoring Methods Electronic Manufacturing (Subpart I) Mandatory Reporting of Greenhouse Gases (40 CFR Part 98)

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Request for Extension of Use of Best Available Monitoring Methods Electronics Manufacturing (Subpart I) Mandatory Reporting of Greenhouse Gases (40 CFR Part 98)

Title:
Request for Extension of Use of Best Available Monitoring Methods Electronics Manufacturing (Subpart I) Mandatory Reporting of Greenhouse Gases (40 CFR Part 98)

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Semiconductor Engineering Models For Apportionment of Fluorinated Greenhouse Gases To Process Categories

Title:
Semiconductor Engineering Models For Apportionment of Fluorinated Greenhouse Gases To Process Categories

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