Analysis of IBM PFC Using Equipment Sets with Regards to Allocation and Verification
Title: Analysis of IBM PFC Using Equipment Sets with Regards to Allocation and Verification
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Comment
Title: Comment
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Cover Page
Title: Cover Page
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Evaluation of Error in using MFC Flow Integration to Estimate PFC Gas Consumption
Title: Evaluation of Error in using MFC Flow Integration to Estimate PFC Gas Consumption
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IBM's comments on EPA's Docket ID No.
EPA-HQ-OAR-2010-0964
Title: IBM's comments on EPA's Docket ID No.
EPA-HQ-OAR-2010-0964
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Request for Extension of Use of Best Available Monitoring Methods Electronic Manufacturing (Subpart I) Mandatory Reporting of Greenhouse Gases (40 CFR Part 98)
Title: Request for Extension of Use of Best Available Monitoring Methods Electronic Manufacturing (Subpart I) Mandatory Reporting of Greenhouse Gases (40 CFR Part 98)
View Attachment:
Request for Extension of Use of Best Available Monitoring Methods Electronics Manufacturing (Subpart I) Mandatory Reporting of Greenhouse Gases (40 CFR Part 98)
Title: Request for Extension of Use of Best Available Monitoring Methods Electronics Manufacturing (Subpart I) Mandatory Reporting of Greenhouse Gases (40 CFR Part 98)
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Semiconductor Engineering Models For Apportionment of Fluorinated Greenhouse Gases To Process Categories
Title: Semiconductor Engineering Models For Apportionment of Fluorinated Greenhouse Gases To Process Categories
Comment submitted by Jay M. Dietrich, CEA Program Manager, Senior Technical Staff Member, IBM Corporation
This is comment on Proposed Rule
Mandatory Reporting of Greenhouse Gases; Changes to Provisions for Electronics Manufacturing (Subpart I) to Provide Flexibility; Proposed rule
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Attachments:
Analysis of IBM PFC Using Equipment Sets with Regards to Allocation and Verification
Title:
Analysis of IBM PFC Using Equipment Sets with Regards to Allocation and Verification
Comment
Title:
Comment
Cover Page
Title:
Cover Page
Evaluation of Error in using MFC Flow Integration to Estimate PFC Gas Consumption
Title:
Evaluation of Error in using MFC Flow Integration to Estimate PFC Gas Consumption
IBM's comments on EPA's Docket ID No. EPA-HQ-OAR-2010-0964
Title:
IBM's comments on EPA's Docket ID No. EPA-HQ-OAR-2010-0964
Request for Extension of Use of Best Available Monitoring Methods Electronic Manufacturing (Subpart I) Mandatory Reporting of Greenhouse Gases (40 CFR Part 98)
Title:
Request for Extension of Use of Best Available Monitoring Methods Electronic Manufacturing (Subpart I) Mandatory Reporting of Greenhouse Gases (40 CFR Part 98)
Request for Extension of Use of Best Available Monitoring Methods Electronics Manufacturing (Subpart I) Mandatory Reporting of Greenhouse Gases (40 CFR Part 98)
Title:
Request for Extension of Use of Best Available Monitoring Methods Electronics Manufacturing (Subpart I) Mandatory Reporting of Greenhouse Gases (40 CFR Part 98)
Semiconductor Engineering Models For Apportionment of Fluorinated Greenhouse Gases To Process Categories
Title:
Semiconductor Engineering Models For Apportionment of Fluorinated Greenhouse Gases To Process Categories
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