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Document Subtype: Company/Organization Comment
Received Date: January 16 2013, at 12:00 AM Eastern Standard Time
Page Count: 1

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ATTACHMENT A - Additional 2012 Etch Emissions Characterization Data

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ATTACHMENT B: New and Revised DRE Test Data Used in SIA Analysis of Alternative Default Dress

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ATTACHMENT C: Derivation of Alternative Default DREs

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Comments of the Semiconductor Industry Association (SIA)

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Cover Page

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