Code of Federal Regulations (Last Updated: November 8, 2024) |
Title 40 - Protection of Environment |
Chapter I - Environmental Protection Agency |
SubChapter C - Air Programs |
Part 63 - National Emission Standards for Hazardous Air Pollutants for Source Categories |
Subpart BBBBB - National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing |
Table 1 to Subpart BBBBB of Part 63 - Requirements for Performance Tests
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Table 1 to Subpart BBBBB of Part 63 - Requirements for Performance Tests
As stated in § 63.7187, you must comply with the requirements for performance tests in the following table:
For . . . You must . . . Using . . . According to the following requirements . . . 1. Process or storage tank vent streams a. Select sampling port's location and the number of traverse ports Method 1 or 1A of 40 CFR part 60, appendix A Sampling sites must be located at the inlet (if emission reduction or destruction efficiency testing is required) and outlet of the control device and prior to any releases to the atmosphere. b. Determine velocity and volumetric flow rate Method 2, 2A, 2C, 2D, 2F, or 2G of 40 CFR part 60, appendix A For HAP reduction efficiency testing only; not necessary for determining compliance with a ppmv concentration limit. c. Conduct gas molecular weight analysis i. Method 3, 3A, or 3B of 40 CFR part 60, appendix A For flow rate determination only. ii. ASME PTC 19.10-1981-Part 10 You may use ASME PTC 19.10-1981-Part 10 (available for purchase from Three Park Avenue, New York, NY 10016-5990) as an alternative to EPA Method 3B. d. Measure moisture content of the stack gas Method 4 of 40 CFR part 60, appendix A For flow rate determination and correction to dry basis, if necessary. 2. Process vent stream a. Measure organic and inorganic HAP concentration (two method option) i. Method 18, 25, or 25A of 40 CFR part 60, appendix A, AND
ii. Method 26 or 26A of 40 CFR part 60, appendix A(1) To determine compliance with the percent by weight emission reduction limit, conduct simultaneous sampling at inlet and outlet of control device and analyze for same organic and inorganic HAP at both inlet and outlet; and
(2) If you use Method 25A to determine the TOC concentration for compliance with the 20 ppmv emission limitation, the instrument must be calibrated on methane or the predominant HAP. If you calibrate on the predominant HAP, you must comply with each of the following:- The organic HAP used as the calibration gas must be the single organic HAP representing the largest percent of emissions by volume. - The results are acceptable if the response from the high level calibration gas is at least 20 times the standard deviation of the response from the zero calibration gas when the instrument is zeroed on its most sensitive scale. - The span value of the analyzer must be less than 100 ppmv.
To determine compliance with 98 percent reduction limit, conduct simultaneous sampling at inlet and outlet of control device and analyze for same organic and inorganic HAP at both inlet and outlet.c. Measure organic and inorganic HAP simultaneously (one method option) Method 320 of 40 CFR part 63, appendix A To determine compliance with the percent by weight emission reduction limit, conduct simultaneous sampling at inlet and outlet of control device and analyze for same organic and inorganic HAP at both inlet and outlet. 3. Storage tank vent stream Measure inorganic HAP concentration Method 26 or 26A of 40 CFR part 60, appendix A, or Method 320 of 40 CFR part 63, appendix A To determine compliance with percent by weight emission reduction limit, conduct simultaneous sampling at inlet and outlet of control device and analyze for same inorganic HAP at both inlet and outlet.