Code of Federal Regulations (Last Updated: October 10, 2024) |
Title 40 - Protection of Environment |
Chapter I - Environmental Protection Agency |
SubChapter C - Air Programs |
Part 63 - National Emission Standards for Hazardous Air Pollutants for Source Categories |
Subpart BBBBB - National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing |
What This Subpart Covers |
§ 63.7181 - Am I subject to this subpart?
Latest version.
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§ 63.7181 Am I subject to this subpart?
(a) You are subject to this subpart if you own or operate a semiconductor manufacturing process unit that is a major source of hazardous air pollutants (HAP) emissions or that is located at, or is part of, a major source of HAP emissions.
(b) A major source of HAP emissions is any stationary source or group of stationary sources located within a contiguous area and under common control that emits or has the potential to emit, considering controls, in the aggregate, any single HAP at a rate of 10 tons per year (tpy) or more or any combination of HAP at a rate of 25 tpy or more.